Process Tools:
Denton Vacuum
www.dentonvacuum.com
Denton Vacuum is an industry leader that provides a wide range of deposition and etching systems. Denton Vacuum manufactures evaporation systems using e-beam or resistive techniques with optional ion sources for film densification. Systems range from lab to full production for both metallic and optical coatings.
Intelligent Mircro Patterning, LLC
www.intelligentmp.com
IMP has developed two distinct maskless patterning systems. The SF-100 XPRESS and the SF-100 XTREME. Either platform can provide features down to 1um. The SF-100 uses a digital light processor (DLP) to generate patterns on flat or curved substrates. IMP now offers precision stages by ALIO and AeroTech. The new LCP, Linear Coating Platform, can be used for a variety of non-standard substrates.
Surface Science Integration
www.ssintegration.com
The Solaris 75 and 150 models are manual loaded, low-cost benchtop RTP systems that are ideal for R&D and pre-production. The Solaris 75/150 can process up to 75/150mm substrates at a temperature range from RT-1300 degrees C. The SSI-1000 is an automated or manual loading wafer identification system that can expose up to 20 alpha-numeric characters across the wafer flat or any other location.
Veeco Ion Beam Equipment
www.veeco.com
Veeco supplies the widest range of ion sources for the broadest variety of applications, including Gridless End-Hall, RF and DC gridded source packages. Veeco is offering a new Mark Plus Power Supply for both Mark I and Mark II sources. Veeco also manufacturers the Spector Dual Ion Beam Depostion (IBD) System with turn-key manufacturing for precision optical thin films and the Isoflux Cylindrical Magnetron (ICM) for use with cylindrical targets to surround the substrate with coating materials.
Components:
Forth-Rite
www.forth-rite.com
Forth-Rite provides RF analysis and control products that provide network analysis, endpoint detection and closed-loop delivered power control. The foundation for all Forth-Rite solutions is the Sense-Rite measurement technology. Sense-Rite measures RF voltage, current, phase and power. Trace-Rite provides RF measurement based and point signals for either plasma etch or plasma chamber clean. Tune-Rite is a portable RF network analysis system. Power-Rite provides closed loop control of RF power, reducing process variability.
InstruTech, Inc
www.instrutechinc.com
InstruTech's products offer the latest in vacuum gauge design and manufacturing. The product offering ranges from stand alone vacuum gauge sensors to complete modules and controllers, that include either built-in or remote displays with single or multi-output options. InstruTech's vacuum gauges are the only gauges that are directly interchangeable with vacuum gauges from Brooks Automation and Helix Technology/Granville-Phillips at considerable lower prices.
SHI Cryogenics www.shicryogenics.com
SHI Cryogenics offers a broader range of quality cryogenic equipment than any other manufacturer. Including 4K and 10K cryocoolers, cryopumps, pulse tubes, shield coolers and laboratory cryostats. This diverse product portfolio features several models and capacities to meet the unique needs of its customers in the semiconductor, solar, research, optical coating and medical industries.
Measurements & Control
Lumetrics
www.lumetrics.com
Lumetrics has created the new standard in thickness gauging for specialty film, flexible packaging and optics. The DI 330 OptiGauge is a revolutionary non-contact, non-destructive, gauging system with the highest guaranteed accuracy. The OptiGauge can accurately measure material thickness from 6 microns to 12mm of optical thickness.
Seren IPS, Inc.
www.serenips.com
Seren IPS manufacturers RF power supplies from 100W-20KW used in conjunction with the AT series automatic match networks. The supplies operate in the frequency range of 100-460KHz & 13.56-60MHz. New Half Rack Series is now available.
Veeco Metrology www.veeco.com
The Veeco Dektak Surface Profiler provides high performance repeatability, versatility, and value in a single system. The Dektak Surface Profiler offers a variety of configurations and add-on options for superior programmability, low-force characterization, and detailed analysis. For power, performance, and reliability, there has never been a more complete profiler at a better price.