Thin Film Deposition and Etching Systems
Systems for PVD, ion beam etching, DLC and optical fiber metalization.
Atomic Layer Deposition Systems
Dual chamber hot-wall reactors for both research and production.
LABTEC SALES, Inc.
Plasma Processing & PVD Systems
Benchtop and stand-alone plasma etch, ICP, RIE, PECVD, Barrel Ashers, and PVD Systems.
RF and End Hall Ion Sources
Ion sources for cleaning, densification and etching of materials.
Rapid Thermal Processing Systems
Benchtop atmospheric systems with dual-side heating to 1200 degrees C for 4", 6" and 8" wafers.
Spector Ion Beam Deposition System
Dual ion beam deposition systems for high quality films.
Multi-Functional Table Top Systems
Sputtering, E-Beam, Thermal and Organic Evaporation Deposition System. R&D and Teaching System